검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual Kaufman ion-beam source setup Gablech I, Svatos V, Caha O, Dubroka A, Pekarek J, Klempa J, Neuzil P, Schneider M, Sikola T Thin Solid Films, 670, 105, 2019 |
| 2 |
Stress-free deposition of [001] preferentially oriented titanium thin film by Kaufman ion-beam source Gablech I, Caha O, Svatos V, Pekarek J, Neuzil P, Sikola T Thin Solid Films, 638, 57, 2017 |