검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
On-line characterisation of radiofrequency magnetron sputter deposition of SiOx using elastic recoil detection van Hattum ED, Arnoldbik WM, Palmero A, Habraken FHPM Thin Solid Films, 494(1-2), 13, 2006 |
| No. | Article |
|---|---|
| 1 |
On-line characterisation of radiofrequency magnetron sputter deposition of SiOx using elastic recoil detection van Hattum ED, Arnoldbik WM, Palmero A, Habraken FHPM Thin Solid Films, 494(1-2), 13, 2006 |