화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 On-line characterisation of radiofrequency magnetron sputter deposition of SiOx using elastic recoil detection
van Hattum ED, Arnoldbik WM, Palmero A, Habraken FHPM
Thin Solid Films, 494(1-2), 13, 2006
2 Physics of arcing, and implications to sputter deposition
Anders A
Thin Solid Films, 502(1-2), 22, 2006
3 Transport phenomena in high performance nanocrystalline ZnO : Ga films deposited by plasma-enhanced chemical vapor deposition
Robbins JJ, Harvey J, Leaf J, Fry C, Wolden CA
Thin Solid Films, 473(1), 35, 2005
4 Growth and structure of silver and silver oxide thin films on sapphire
Bock FX, Christensen TM, Rivers SB, Doucette LD, Lad RJ
Thin Solid Films, 468(1-2), 57, 2004