검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Low dielectric constant films prepared by plasma-enhanced chemical vapor deposition from trimethylsilane Wang MR, Rusli, Yu MB, Babu N, Li CY, Rakesh K Thin Solid Films, 462-63, 219, 2004 |
| No. | Article |
|---|---|
| 1 |
Low dielectric constant films prepared by plasma-enhanced chemical vapor deposition from trimethylsilane Wang MR, Rusli, Yu MB, Babu N, Li CY, Rakesh K Thin Solid Films, 462-63, 219, 2004 |