검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Growth of highly c-axis-oriented aluminum nitride thin films on molybdenum electrodes using aluminum nitride interlayers Kamohara T, Akiyama M, Ueno N, Nonaka K, Tateyama H Journal of Crystal Growth, 275(3-4), 383, 2005 |
| 2 |
Effect of Nitrogen Gas-Pressure on Residual-Stress in AlN Films Deposited by the Planar Magnetron Sputtering System Kusaka K, Hanabusa T, Tominaga K Thin Solid Films, 281-282, 340, 1996 |