화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Transmission Electron-Microscopy of the Sequence of Phase-Formation in the Interfacial Solid-Phase Reactions in Ta/Si Systems
Noya A, Takeyama M, Sasaki K, Aoyagi E, Hiraga K
Journal of Vacuum Science & Technology A, 15(2), 253, 1997
2 Thermal-Stability of Cu/W/Si Contact Systems Using Layers of Cu(111) and W(110) Preferred Orientations
Takeyama M, Noya A, Fukuda T
Journal of Vacuum Science & Technology A, 15(2), 415, 1997
3 Kinetic Plots for Predicting Silicide Formation Sequence
Zhang L, Ivey DG
Thin Solid Films, 245(1-2), 234, 1994