검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Comparative studies on surface modification of poly(ethylene terephthalate) by remote and direct argon plasmas Inagaki N, Tasaka S, Shimada S Journal of Applied Polymer Science, 79(5), 808, 2001 |
| 2 |
Investigation of particle formation during the plasma enhanced chemical vapor deposition of amorphous silicon, oxide, and nitride films Rao NP, Wu Z, Nijhawan S, Ziemann P, Campbell S, Kittelson DB, McMurry P Journal of Vacuum Science & Technology B, 16(2), 483, 1998 |
| 3 |
Spatially-Resolved Optical-Emission for Characterization of a Planar Radio-Frequency Inductively-Coupled Discharge Beale DF, Wendt AE, Mahoney LJ Journal of Vacuum Science & Technology A, 12(5), 2775, 1994 |