검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Electrical impedance analysis and etch rate maximization in NF3/Ar discharges Langan JG, Rynders SW, Felker BS, Beck SE Journal of Vacuum Science & Technology A, 16(4), 2108, 1998 |
| No. | Article |
|---|---|
| 1 |
Electrical impedance analysis and etch rate maximization in NF3/Ar discharges Langan JG, Rynders SW, Felker BS, Beck SE Journal of Vacuum Science & Technology A, 16(4), 2108, 1998 |