검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Study of the evolution of nanoscale roughness from the edge of exposed resist to the sidewall of deep-etched lnP/InGaAsP heterostructures Jang JH, Zhao W, Bae JW, Adesida I, Lepore A, Kwakernaak M, Abeles JH Journal of Vacuum Science & Technology B, 22(5), 2538, 2004 |
| 2 |
Characterization of sidewall, roughness of InP/InGaAsP etched using inductively coupled plasma for low loss optical waveguide applications Bae JW, Zhao W, Jang JH, Adesida I, Lepore A, Kwakernaak M, Abeles JH Journal of Vacuum Science & Technology B, 21(6), 2888, 2003 |
| 3 |
Effect of H-2 on the etch profile of InP/InGaAsP alloys in Cl-2/Ar/H-2 inductively coupled plasma reactive ion etching chemistries for photonic device fabrication Rommel SL, Jang JH, Lu W, Cueva G, Zhou L, Adesida I, Pajer G, Whaley R, Lepore A, Schellanbarger Z, Abeles JH Journal of Vacuum Science & Technology B, 20(4), 1327, 2002 |