검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Properties of combined TiN and Pt thin films applied to gas sensing Abom AE, Hultman L, Eriksson M, Twesten RD Journal of Vacuum Science & Technology A, 20(3), 667, 2002 |
| 2 |
Influence of gate metal film growth parameters on the properties of gas sensitive field-effect devices Abom AE, Persson P, Hultman L, Eriksson M Thin Solid Films, 409(2), 233, 2002 |