검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Dry vacuum pumps: A method for the evaluation of the degree of dry Davis RP, Abreu RA, Chew AD Journal of Vacuum Science & Technology A, 18(4), 1782, 2000 |
| 2 |
Development and qualification of a vacuum pumping system for metalorganic vapor phase epitaxy copper precursors Davis RP, Abreu RA Journal of Vacuum Science & Technology B, 18(6), 2794, 2000 |
| 3 |
Preliminary measurements illustrating the effect of desorption and molecular residence times on the molecular drag process Chew AD, Dedman ER, Abreu RA, Creaye I Journal of Vacuum Science & Technology A, 17(4), 2075, 1999 |
| 4 |
Causes of Anomalous Solid Formation in the Exhaust Systems of Low-Pressure Chemical-Vapor-Deposition and Plasma-Enhanced Chemical-Vapor-Deposition Semiconductor Processes Abreu RA, Troup AP, Sahm MK Journal of Vacuum Science & Technology B, 12(4), 2763, 1994 |