검색결과 : 35건
| No. | Article |
|---|---|
| 1 |
Influence of process parameters on atomic layer deposition of ZrO2 thin films from CpZr(NMe2)(3) and H2O Aarik L, Alles H, Aidla A, Kahro T, Kukli K, Niinisto J, Mandar H, Tamm A, Rammula R, Sammelselg V, Aarik J Thin Solid Films, 565, 37, 2014 |
| 2 |
Atomic layer deposition of high-k dielectrics on carbon nanoparticles Tamm A, Peikolainen AL, Kozlova J, Mandar H, Aidla A, Rammula R, Aarik L, Roosalu K, Lu J, Hultman L, Koel M, Kukli K, Aarik J Thin Solid Films, 538, 16, 2013 |
| 3 |
Chemical resistance of thin film materials based on metal oxides grown by atomic layer deposition Sammelselg V, Netsipailo I, Aidla A, Tarre A, Aarik L, Asari J, Ritslaid P, Aarik J Thin Solid Films, 542, 219, 2013 |
| 4 |
Atomic layer deposition of ferromagnetic iron oxide films on three-dimensional substrates with tin oxide nanoparticles Tamm A, Dimri MC, Kozlova J, Aidla A, Tatte T, Arroval T, Maeorg U, Mandar H, Stern R, Kukli K Journal of Crystal Growth, 343(1), 21, 2012 |
| 5 |
Atomic layer deposition of Ru films from bis(2,5-dimethylpyrrolyl)ruthenium and oxygen Kukli K, Aarik J, Aidla A, Jogi I, Arroval T, Lu J, Sajavaara T, Laitinen M, Kiisler AA, Ritala M, Leskela M, Peck J, Natwora J, Geary J, Spohn R, Meiere S, Thompson DM Thin Solid Films, 520(7), 2756, 2012 |
| 6 |
Atomic Layer Deposition of Ruthenium Films from (Ethylcyclopentadienyl)(pyrrolyl)ruthenium and Oxygen Kukli K, Kemell M, Puukilainen E, Aarik J, Aidla A, Sajavaara T, Laitinen M, Tallarida M, Sundqvist J, Ritala M, Leskela M Journal of the Electrochemical Society, 158(3), D158, 2011 |
| 7 |
Structure and morphology of Ru films grown by atomic layer deposition from 1-ethyl-1'-methyl-ruthenocene Kukli K, Aarik J, Aidla A, Uustare T, Jogi I, Lu J, Tallarida M, Kemell M, Kiisler AA, Ritala M, Leskela M Journal of Crystal Growth, 312(12-13), 2025, 2010 |
| 8 |
Epitaxial growth of high-kappa TiO2 rutile films on RuO2 electrodes Frohlich K, Aarik J, Tapajna M, Rosova A, Aidla A, Dobrocka E, Huskova K Journal of Vacuum Science & Technology B, 27(1), 266, 2009 |
| 9 |
Nanostructured solar cell by spray pyrolysis: Effect of titania barrier layer on the cell performance Acik IO, Katerski A, Mere A, Aarik J, Aidla A, Dedova T, Krunks M Thin Solid Films, 517(7), 2443, 2009 |
| 10 |
Growth of high-dielectric-constant TiO2 films in capacitors with RuO2 electrodes Frohlich K, Tapajna M, Rosova A, Dobrocka E, Husekova K, Aarik J, Aidla A Electrochemical and Solid State Letters, 11(6), G19, 2008 |