화학공학소재연구정보센터
검색결과 : 8건
No. Article
1 AFM observation of OMVPE-grown ErP on InP substrates using a new organometal tris(ethylcyclopentadienyl)erbium (Er(EtCp)(3))
Akane T, Jinno S, Yang Y, Kuno T, Hirata T, Isogai Y, Watanabe N, Fujiwara Y, Nakamura A, Takeda Y
Applied Surface Science, 216(1-4), 537, 2003
2 Multiwavelength excitation processing using F-2 and KrF excimer lasers for precision microfabrication of hard materials
Sugioka K, Akane T, Obata K, Toyoda K, Midorikawa K
Applied Surface Science, 197, 814, 2002
3 GaN ablation etching by simultaneous irradiation with F-2 laser and KrF excimer laser
Akane T, Sugioka K, Hammura K, Aoyagi Y, Midorikawa K, Obata K, Toyoda K, Nomura S
Journal of Vacuum Science & Technology B, 19(4), 1388, 2001
4 F-2 laser etching of GaN
Akane T, Sugioka K, Nomura S, Hammura K, Aoki N, Toyoda K, Aoyagi Y, Midorikawa K
Applied Surface Science, 168(1-4), 335, 2000
5 Nonalloy Ohmic contact fabrication in a hydrothermally grown n-ZnO (0001) substrate by KrF excimer laser irradiation
Akane T, Sugioka K, Midorikawa K
Journal of Vacuum Science & Technology B, 18(3), 1406, 2000
6 Low temperature epitaxial growth of Si on Si(111) by gas-source MBE with heat-pulse annealing
Ishikawa T, Okumura H, Akane T, Sano M, Giraud S, Nakabayashi Y, Matsumoto S
Thin Solid Films, 336(1-2), 232, 1998
7 Comparison of Conventional Surface Cleaning Methods for Si Molecular-Beam Epitaxy
Okumura H, Akane T, Tsubo Y, Matsumoto S
Journal of the Electrochemical Society, 144(11), 3765, 1997
8 New Ge Substrate Cleaning Method for Si1-X-Ygexcy MOMBE Growth
Akane T, Okumura H, Tanaka J, Matsumoto S
Thin Solid Films, 294(1-2), 153, 1997