검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
A gradational lead screw dry vacuum pump Akutsu I, Matsuoka T, Ozaki M, Kyuko T, Miyashita S, Ozawa T, Naka M, Ohnishi H, Narahara Y, Horikoshi G Journal of Vacuum Science & Technology A, 18(3), 1045, 2000 |
| 2 |
Gradational lead screw vacuum pump development Ando K, Akutsu I, Ohmi T Journal of Vacuum Science & Technology A, 17(5), 3144, 1999 |
| 3 |
Innovation of the fore pump and roughing pump for high-gas-flow semiconductor processing Akutsu I, Ohmi T Journal of Vacuum Science & Technology A, 17(6), 3505, 1999 |