화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Accurate SIMS doping profiling of aluminum-doped solid-phase epitaxy silicon islands
Civale Y, Nanver LK, Alberici SG, Gammon A, Kelly I
Electrochemical and Solid State Letters, 11(4), H74, 2008
2 Phosphorous degassing from poly silicon under thermal exposure: A ToF-SIMS depth profile investigation
Alberici SG, Piagge R
Applied Surface Science, 252(19), 7272, 2006
3 Ti diffusion in chalcogenides: a ToF-SIMS depth profile characterization approach
Alberici SG, Zonca R, Pashmakov B
Applied Surface Science, 231-2, 821, 2004