검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The growth chemistry and interfacial properties of silicon oxynitride and metal oxide ultrathin films on silicon Lu HC, Gusev E, Yasuda N, Green M, Alers G, Garfunkel E, Gustafsson T Applied Surface Science, 166(1-4), 465, 2000 |