검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Evaluation of octafluorocyclobutane as a chamber clean gas in a plasma-enhanced silicon dioxide chemical vapor deposition reactor Allgood C, Mocella M, Chae HY, Sawin H Journal of the Electrochemical Society, 150(2), G122, 2003 |