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| No. | Article |
|---|---|
| 1 |
Novel fabrication technique for 0.1 mu m T-shaped gate with i-line negative resist and poly(methylmethacrylate) Anda Y, Matsuno T, Tanabe M, Uda T, Yanagihara M, Nishii K, Inoue K, Hirose N, Matsui T Journal of Vacuum Science & Technology B, 17(2), 320, 1999 |