검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Comparative study of Cl-2, Cl-2/O-2, and Cl-2/N-2 inductively coupled plasma processes for etching of high-aspect-ratio photonic-crystal holes in InP Carlstrom CF, van der Heijden R, Andriesse MSP, Karouta F, van der Heijden RW, van der Drift E, Salemink HWM Journal of Vacuum Science & Technology B, 26(5), 1675, 2008 |
| 2 |
Magnetization losses in submicrometer CoFeB dots etched in a high ion density Cl-2-based plasma Fabrie CGCHM, Kohlhepp JT, Swagten HJM, Koopmans B, Andriesse MSP, van der Drift E Journal of Vacuum Science & Technology B, 24(6), 2627, 2006 |
| 3 |
High speed, dry etching of Fe for integration of magnetic devices in microelectronics Andriesse MSP, van der Drift E, Sloof WG Journal of Vacuum Science & Technology B, 19(6), 2901, 2001 |