검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Observation and evaluation of flaked particle behavior in magnetically enhanced reactive ion etching equipment using a dipole ring magnet Moriya T, Nagaike H, Denpoh K, Morimoto T, Aomori M, Kawaguchi S, Shimada M, Okuyama K Journal of Vacuum Science & Technology B, 22(4), 1688, 2004 |
| 2 |
The application of in situ monitor of extremely rarefied particle clouds grown thermally above wafers by using laser light scattering method to the development of the mass-production condition of the tungsten thermal chemical vapor deposition Ito N, Moriya T, Uesugi F, Moriya S, Aomori M, Kato Y Journal of Vacuum Science & Technology A, 19(4), 1248, 2001 |