검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The impact of graphite furnace parts on radial impurity distribution in Czochralski-grown single-crystal silicon Gilmore D, Arahori T, Ito M, Murakami H, Miki S Journal of the Electrochemical Society, 145(2), 621, 1998 |
| No. | Article |
|---|---|
| 1 |
The impact of graphite furnace parts on radial impurity distribution in Czochralski-grown single-crystal silicon Gilmore D, Arahori T, Ito M, Murakami H, Miki S Journal of the Electrochemical Society, 145(2), 621, 1998 |