검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Image quality improvement in focused ion beam photomask repair system Yasaka A, Aramaki F, Muramatsu M, Kozakai T, Matsuda O, Sugiyama Y, Doi T, Takaoka O, Hagiwara R, Nakamae K Journal of Vacuum Science & Technology B, 26(6), 2121, 2008 |
| 2 |
Application of vector scanning in focused ion beam photomask repair system Yasaka A, Aramaki F, Muramatsu M, Kozakai T, Matsuda O, Sugiyama Y, Doi T, Takaoka O, Hagiwara R, Nakamae K Journal of Vacuum Science & Technology B, 26(6), 2127, 2008 |