화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Recent tests of negative electron affinity photocathodes as source for electron lithography and microscopy
Arcuni P, Presley S, Aebi V, Spicer WE
Journal of Vacuum Science & Technology B, 19(6), 2585, 2001
2 Prototype negative electron affinity-based multibeam electron gun for lithography and microscopy
Baum A, Arcuni P, Aebi V, Presley S, Elder M
Journal of Vacuum Science & Technology B, 17(6), 2819, 1999