검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of Advanced Plasma Source bias voltage on properties of HfO2 films prepared by plasma ion assisted electron evaporation from metal hafnium Zhu MP, Yi K, Arhilger D, Qi HJ, Shao JD Thin Solid Films, 540, 17, 2013 |
| No. | Article |
|---|---|
| 1 |
Effect of Advanced Plasma Source bias voltage on properties of HfO2 films prepared by plasma ion assisted electron evaporation from metal hafnium Zhu MP, Yi K, Arhilger D, Qi HJ, Shao JD Thin Solid Films, 540, 17, 2013 |