검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Approach to full-chip simulation and correction of stencil mask distortion for proximity electron lithography Sawamura J, Suzuki K, Omori S, Ashida I, Ohnuma H Journal of Vacuum Science & Technology B, 22(6), 3092, 2004 |
| 2 |
Complementary masking approach for proximity electron lithography Omori S, Iwase K, Amai K, Sasaki T, Hane H, Koike K, Nohama S, Ashida I, Kitagawa T, Moriya S Journal of Vacuum Science & Technology B, 21(1), 57, 2003 |
| 3 |
A Novel Technique for Shifter Void Defect Repair by a Focused Ion-Beam Tool Jinbo H, Takushima K, Saito T, Ashida I, Tanaka Y Journal of Vacuum Science & Technology B, 12(6), 3760, 1994 |