검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Patterning of 0.175 mu m platinum features using Ar/O-2 chemically assisted ion-beam etching Gutsche MU, Athavale SD, Williams K, Hines D Journal of Vacuum Science & Technology B, 18(2), 765, 2000 |
| 2 |
Chemical-Vapor-Deposition of Aluminum and Gallium Nitride Thin-Films from Metalorganic Precursors Hoffman DM, Rangarajan SP, Athavale SD, Economou DJ, Liu JR, Zheng ZS, Chu WK Journal of Vacuum Science & Technology A, 14(2), 306, 1996 |
| 3 |
Realization of Atomic Layer Etching of Silicon Athavale SD, Economou DJ Journal of Vacuum Science & Technology B, 14(6), 3702, 1996 |
| 4 |
Plasma-Enhanced Chemical-Vapor-Deposition of Silicon, Germanium, and Tin Nitride Thin-Films from Metalorganic Precursors Hoffman DM, Rangarajan P, Athavale SD, Economou DJ, Liu JR, Zheng ZS, Chu WK Journal of Vacuum Science & Technology A, 13(3), 820, 1995 |
| 5 |
Molecular-Dynamics Simulation of Atomic Layer Etching of Silicon Athavale SD, Economou DJ Journal of Vacuum Science & Technology A, 13(3), 966, 1995 |