검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Structure and properties of silicon oxide films deposited in a dual microwave-rf plasma reactor Benissad N, Aumaille K, Granier A, Goullet A Thin Solid Films, 384(2), 230, 2001 |
| 2 |
A comparative study of oxygen/organosilicon plasmas and thin SiOxCyHz films deposited in a helicon reactor Aumaille K, Vallee C, Granier A, Goullet A, Gaboriau F, Turban G Thin Solid Films, 359(2), 188, 2000 |
| 3 |
Experimental investigation of the respective roles of oxygen atoms and electrons in the deposition of SiO2 in O-2/TEOS helicon plasmas Granier A, Vallee C, Goullet A, Aumaille K, Turban G Journal of Vacuum Science & Technology A, 17(5), 2470, 1999 |