검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
An effective diffusion barrier metallization process on copper So WW, Choe S, Chuang R, Lee CC Thin Solid Films, 376(1-2), 164, 2000 |
| 2 |
Characteristics of TiN barrier layer against Cu diffusion Kwak MY, Shin DH, Kang TW, Kim KN Thin Solid Films, 339(1-2), 290, 1999 |
| 3 |
Effect of the gas-phase reaction in metallorganic chemical vapor deposition of TiN from tetrakis(dimethylamido)titanium Yun JY, Park MY, Rhee SW Journal of the Electrochemical Society, 145(7), 2453, 1998 |
| 4 |
Nucleation and growth of CVD Al on different types of TiN Avinun M, Barel N, Kaplan WD, Eizenberg M, Naik M, Guo T, Chen LY, Mosely R, Littau K, Zhou S, Chen L Thin Solid Films, 320(1), 67, 1998 |
| 5 |
Effect of the carrier gas on the metal-organic chemical vapor deposition of TiN from tetrakis-dimethyl-amido-titanium Yun JY, Rhee SW Thin Solid Films, 320(2), 163, 1998 |
| 6 |
The Interactions Among the Al/Mo-N/Au Multilayer Lin KL, Ho YJ Thin Solid Films, 260(1), 93, 1995 |