검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Dry etching process of GaAs in capacitively coupled BCl3-based plasmas Lee JW, Noh HS, Lee SH, Park JH, Choi KH, Pearton SJ Thin Solid Films, 518(22), 6488, 2010 |
| 2 |
Etch characteristics of magnetic tunnel junction stack with nanometer-sized patterns for magnetic random access memory Min SR, Cho HN, Kim KW, Cho YJ, Choa SH, Chung CW Thin Solid Films, 516(11), 3507, 2008 |