검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
A study of GaN etching characteristics using HBr-based inductively coupled plasmas Kim DW, Jeong CH, Lee HY, Kim HS, Sung YJ, Yeom GY Solid-State Electronics, 47(3), 549, 2003 |
| No. | Article |
|---|---|
| 1 |
A study of GaN etching characteristics using HBr-based inductively coupled plasmas Kim DW, Jeong CH, Lee HY, Kim HS, Sung YJ, Yeom GY Solid-State Electronics, 47(3), 549, 2003 |