화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 On the impact of silicon nitride technology on charge trap NAND memories
Sebastiani A, Scozzari C, Mauri A, Modelli A, Albini G, Piagge R, Bacciaglia P, Del Vitto A, Alessandri M, Grossi A, Tessariol P, Ghidini G
Journal of Vacuum Science & Technology B, 27(1), 490, 2009
2 Quantitative evaluation of iron at the silicon surface after wet cleaning treatments
Caputo D, Bacciaglia P, Carpanese C, Polignano ML, Lazzeri P, Bersani M, Vanzetti L, Pianetta P, Moro L
Journal of the Electrochemical Society, 151(5), G289, 2004