검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
New Silicon-Rich Silylating Reagents for Dry-Developed Positive-Tone Deep-Ultraviolet Lithography Wheeler DR, Hutton S, Stein S, Baiocchi F, Cheng M, Taylor G Journal of Vacuum Science & Technology B, 11(6), 2789, 1993 |
| No. | Article |
|---|---|
| 1 |
New Silicon-Rich Silylating Reagents for Dry-Developed Positive-Tone Deep-Ultraviolet Lithography Wheeler DR, Hutton S, Stein S, Baiocchi F, Cheng M, Taylor G Journal of Vacuum Science & Technology B, 11(6), 2789, 1993 |