검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Simulation of spatial characteristics of very high frequency hydrogen plasma produced by a balanced power feeding Ogiwara K, Chen WT, Uchino K, Kawai Y Thin Solid Films, 547, 132, 2013 |
| 2 |
Effect of the very high frequency plasma with a balanced power feeding on silicon film deposition Muta H, Mizuno K, Nishida S, Kuribayashi S Thin Solid Films, 523, 41, 2012 |