검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Plasma enhanced chemical vapor deposition of silicon oxide films using TMOS/O-2 gas and plasma diagnostics Bang SB, Chung TH, Kim Y Thin Solid Films, 444(1-2), 125, 2003 |
| No. | Article |
|---|---|
| 1 |
Plasma enhanced chemical vapor deposition of silicon oxide films using TMOS/O-2 gas and plasma diagnostics Bang SB, Chung TH, Kim Y Thin Solid Films, 444(1-2), 125, 2003 |