검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Selective etching of GaN over AlN using an inductively coupled plasma and an O-2/Cl-2/Ar chemistry Smith SA, Lampert WV, Rajagopal P, Banks AD, Thomson D, Davis RF Journal of Vacuum Science & Technology A, 18(3), 879, 2000 |
| 2 |
Growth of Fe3N films via chemical vapor deposition of iron acetylacetonate and anhydrous ammonia Roberson SL, Finello D, Banks AD, Davis RF Thin Solid Films, 326(1-2), 47, 1998 |