검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Novel High-Density Plasma Tool for Large-Area Flat-Panel Display Etching Heinrich F, Banziger U, Jentzsch A, Neumann G, Huth C Journal of Vacuum Science & Technology B, 14(3), 2000, 1996 |
| No. | Article |
|---|---|
| 1 |
Novel High-Density Plasma Tool for Large-Area Flat-Panel Display Etching Heinrich F, Banziger U, Jentzsch A, Neumann G, Huth C Journal of Vacuum Science & Technology B, 14(3), 2000, 1996 |