화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 In-Ga-Zn-O thin films with tunable optical and electrical properties prepared by high-power impulse magnetron sputtering
Rezek J, Houska J, Prochazka M, Haviar S, Kozak T, Baroch P
Thin Solid Films, 658, 27, 2018
2 High-rate reactive deposition of transparent SiO2 films containing low amount of Zr from molten magnetron target
Musil J, Satava V, Baroch P
Thin Solid Films, 519(2), 775, 2010
3 Atmospheric plasma-calcination of mesoporous tungsten oxide utilizing plasma dielectric barrier discharge
Baroch P, Hieda J, Saito N, Takai O
Thin Solid Films, 515(12), 4905, 2007
4 Reactive magnetron sputtering of thin films: present status and trends
Musil J, Baroch P, Vlcek J, Nam KH, Han JG
Thin Solid Films, 475(1-2), 208, 2005