검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Defocus Asymmetry in Projection Printing Barouch E, Hollerbach U, Orszag SA Journal of Vacuum Science & Technology B, 12(6), 3778, 1994 |
| 2 |
Evaluation of Depth-of-Focus in Photolithography at 193 and 248 nm for Feature Sizes of 0.25 Mu-M and Below Rothschild M, Doran SP, Barouch E, Hollerbach U, Orszag SA Journal of Vacuum Science & Technology B, 11(6), 2720, 1993 |