검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Experimental validation of full-field extreme ultraviolet lithography flare and shadowing corrections Myers AM, Lorusso GF, Kim I, Goethals AM, Jonckheere R, Hermans J, Baudemprez B, Ronse K Journal of Vacuum Science & Technology B, 26(6), 2215, 2008 |