검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Behavior of molybdenum in silicon evaluated for integrated circuit processing Benton JL, Jacobson DC, Jackson B, Johnson JA, Boone T, Eaglesham DJ, Stevie FA, Becerro J Journal of the Electrochemical Society, 146(5), 1929, 1999 |