검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Low-temperature growth of epitaxial (100) silicon based on silane and disilane in a 300 mm UHV/CVD cold-wall reactor Adarn TN, Bedell S, Reznicek A, Sadana DK, Venkateshan A, Tsunoda T, Seino T, Nakatsuru J, Shinde SR Journal of Crystal Growth, 312(23), 3473, 2010 |
| 2 |
Surface segregation of Al of the bilayers of pure Cu and Cu-Al alloy films Wang PI, Murarka SP, Kaminski DA, Bedell S, Lanford WA Journal of the Electrochemical Society, 148(9), G481, 2001 |
| 3 |
Capacitance-voltage, current-voltage, and thermal stability of copper alloyed with aluminium or magnesium de Felipe TS, Murarka SP, Bedell S, Lanford WA Thin Solid Films, 335(1-2), 49, 1998 |
| 4 |
Bias-temperature stability of the Cu(Mg)/SiO2/p-Si metal-oxide-semiconductor capacitors de Felipe TS, Murarka SP, Bedell S, Lanford WA Journal of Vacuum Science & Technology B, 15(6), 1987, 1997 |