화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Multi-level relief structures in sol-gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy
Neiss E, Flury M, Gerard P, Mager L, Rehspringer JL, Fort A, Montgomery P, Fontaine J, Engel T, Benatmane A
Applied Surface Science, 254(7), 1986, 2008
2 Buried interface characterization by interference microscopy
Benatmane A, Montgomery PC
Thin Solid Films, 450(1), 187, 2004
3 Interference microscopy for nanometric surface microstructure analysis in excimer laser processing of silicon for flat panel displays
Benatmane A, Montgomery PC, Fogarassy E, Zahorski D
Applied Surface Science, 208, 189, 2003
4 Excimer laser ablation lithography applied to the fabrication of reflective diffractive optics
Flury M, Benatmane A, Gerard P, Montgomery PC, Fontaine J, Engel T, Schunck JP, Fogarassy E
Applied Surface Science, 208, 238, 2003