검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Elymat measurement of intentionally contaminated and dry etched wafers Wittmann J, Bergholz W, Hoffmann H Journal of the Electrochemical Society, 146(1), 313, 1999 |
| 2 |
A Dislocation Formation Model of Trench-Induced Dislocations in Dynamic Random-Access Memories Dellith M, Booker GR, Kolbesen BO, Bergholz W, Gelsdorf F Journal of the Electrochemical Society, 143(1), 210, 1996 |