검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Cathode ray tube type electron gun as a source for multibeam electron lithography van den Brom AJ, van Veen AHV, Weeda WM, Berglund GZM, Wieland M, Kruit P Journal of Vacuum Science & Technology B, 25(6), 2245, 2007 |
| No. | Article |
|---|---|
| 1 |
Cathode ray tube type electron gun as a source for multibeam electron lithography van den Brom AJ, van Veen AHV, Weeda WM, Berglund GZM, Wieland M, Kruit P Journal of Vacuum Science & Technology B, 25(6), 2245, 2007 |