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| No. | Article |
|---|---|
| 1 |
Comprehensive study of focused ion beam induced lateral damage in silicon by scanning probe microscopy techniques Rommel M, Spoldi G, Yanev V, Beuer S, Amon B, Jambreck J, Petersen S, Bauer AJ, Frey L Journal of Vacuum Science & Technology B, 28(3), 595, 2010 |