검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Deposition of amorphous carbon nitride films using Ar/N-2 supermagnetron sputter Kinoshita H, Kubota M, Ohno G Thin Solid Films, 518(13), 3502, 2010 |
| 2 |
Microstructure and nanomechanical properties of cubic boron nitride films prepared by bias sputter deposition Yamada Y, Tsuda O, Yoshida T Thin Solid Films, 316(1-2), 35, 1998 |