검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Electron-beam-based photomask repair Edinger K, Becht H, Bihr J, Boegli V, Budach M, Hofmann T, Koops HWP, Kuschnerus P, Oster J, Spies P, Weyrauch B Journal of Vacuum Science & Technology B, 22(6), 2902, 2004 |
| 2 |
AN OMEGA ENERGY FILTERING TEM - PRINCIPLES AND APPLICATIONS PROBST W, BENNER G, BIHR J, WEIMER E Advanced Materials, 5(4), 297, 1993 |