화학공학소재연구정보센터
검색결과 : 14건
No. Article
1 In-situ observations of stress-induced thin film failures
Zhao ZB, Hershberger J, Bilello JC
Thin Solid Films, 518(8), 2037, 2010
2 Stress anisotropy and stress gradient in magnetron sputtered films with different deposition geometries
Zhao ZB, Yalisove SM, Bilello JC
Journal of Vacuum Science & Technology A, 24(2), 195, 2006
3 Nanostructured chromium nitride films with a valley of residual stress
Zhao ZB, Rek ZU, Yalisove SM, Bilello JC
Thin Solid Films, 472(1-2), 96, 2005
4 In situ x-ray diffraction observation of multiple texture turnovers in sputtered Cr films
Zhao ZB, Rek ZU, Yalisove SM, Bilello JC
Journal of Vacuum Science & Technology A, 22(6), 2365, 2004
5 In situ observations of the real-time stress-evolution and delamination of thin Ta films on Si(100)
French BL, Bilello JC
Thin Solid Films, 446(1), 91, 2004
6 Nature of the as-deposited state of AlCuFeCrPVD coatings
Daniels MJ, King D, Phillips B, Zabinski JS, Bilello JC
Thin Solid Films, 440(1-2), 87, 2003
7 Real-time/in situ diffraction study of phase and microstructural evolution in sputtered beta-Ta/Ta2O5 films (vol 19, 2910, 2001)
Whitacre JF, Yalisove SM, Bilello JC
Journal of Vacuum Science & Technology A, 20(4), 1505, 2002
8 Determination of residual stress in thin films: a comparative study of X-ray topography versus laser curvature method
Zhao ZB, Hershberger J, Yalisove SM, Bilello JC
Thin Solid Films, 415(1-2), 21, 2002
9 Real-time/in situ diffraction study of phase and microstructural evolution in sputtered beta-Ta/Ta2O5 films
Whitacre JF, Yalisove SM, Bilello JC
Journal of Vacuum Science & Technology A, 19(6), 2910, 2001
10 Strain Gradients and Normal Stresses in Textured Mo Thin-Films
Malhotra SG, Rek ZU, Yalisove SM, Bilello JC
Journal of Vacuum Science & Technology A, 15(2), 345, 1997