검색결과 : 1건
No. | Article |
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1 |
Experimental analysis and finite element modelling of nano-scratch test applied on 40-120 nm SiCN thin films deposited on Cu/Si substrate Roy S, Darque-Ceretti E, Felder E, Raynal F, Bispo I Thin Solid Films, 518(14), 3859, 2010 |