검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Magnetic field optimization in a dielectric magnetically enhanced reactive ion etch reactor to produce an instantaneously uniform plasma Lindley RA, Bjorkman CH, Shan H, Ke KH, Doan K, Mett RR, Welch M Journal of Vacuum Science & Technology A, 16(3), 1600, 1998 |
| 2 |
Optical Anisotropy of Singular and Vicinal Si-SiO2 Interfaces and H-Terminated Si Surfaces Yasuda T, Aspnes DE, Lee DR, Bjorkman CH, Lucovsky G Journal of Vacuum Science & Technology A, 12(4), 1152, 1994 |